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Source text - English The thin-film ZnO pyroelectric sensor uses the pyroelectric effect to convert temperature variation to corresponding electrical signal. The interaction in fabrication of ZnO pyroelectric sensor, characterization and mechanical properties of ZnO thin film to improve the responsivity was presented in this study. The ZnO pyroelectric sensor was fabricated by procedure of MEMS fabrication included backside-etching windows, deposition of isolation layer by LPCVD, deposition of top and bottom electrodes by thermal evaporator, and sputtering of ZnO thin film. Then, the characteristic of ZnO thin film was critical element to generate the pyroelectric signals when incident energy was applied to sensor.
The results of present work presented that the voltage responsivity of ZnO pyroelectric sensor was related to the morphology, pyroelectric coefficient and mechanical properties (hardness and elastic modulus) of ZnO thin film significantly. The residual stress of thin film deposited process was discussed because of its affection of responsivity, morphology and mechanical properties of ZnO thin film.
In this study developed a model which expected residual stress on each deposited layer of ZnO pyroelectric sensor by Stony equation. The original Stony equation discussed formulation of stress which appeared in single layer structure only. So author replaced the parameters of thin film in Stony equation which included thickness, elastic modulus and calculated new formulation by mathematical program (Mathematica).
Finally, author got a new formulation which predicted residual stress on n-th deposited layers of ZnO pyroelectric sensor.
Translation - English The thin-film ZnO pyroelectric sensor uses the pyroelectric effect to convert the temperature variation to a corresponding electrical signal. The ZnO pyroelectric sensor was made by the MEMS fabrication procedure, including a backside-etching windows technique, LPCVD of the isolation layer, deposition of top and bottom electrodes by thermal evaporator, and sputtering of ZnO thin film. The critical element of the ZnO thin film characteristics is whether it can generate the pyroelectric signal when incident energy was applied to the sensor. The fabrication, characterization, and mechanical properties of the ZnO thin film pyroelectric sensor may have some relation to the responsivity. To improve the responsivity, the author developed a model based on the Stony equation, which expected residual stress on n-th deposited layer of ZnO pyroelectric sensor. The original Stony equation discussed the formulation of stress which appears in single layered structures only. So the author replaced the parameters of thin film in Stony equation which included thickness, elastic modulus and calculated a new formulation with Mathematica™. After using the model to predict the residual stress in the pyroelectric sensor, the hightened responsivity of the pyroelectric sensor had better elastic modulus than the low responsivity of the pyroelectric sensor. The results showed that the voltage responsivity of the ZnO pyroelectric sensor was related to the morphology, the pyroelectric coefficient, the residual stress, and the mechanical properties (i.e. hardness and elastic modulus) of the ZnO thin film significantly.
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Years of experience: 20. Registered at ProZ.com: May 2010.
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